2011, Vol.14, No.3, pp.232-235
A new surface sensor for scanning near-field optical microscope based on a
piezoelectric tuning fork has been designed and fabricated. The registered
values of the quality factor of the oscillatory system of the produced
device are in the range of 4000 $\div $ 8000, this value is high enough and
confirms its work capacity. Created useful model can be applied for
obtaining the optical image of the surface of micro-objects with the
super-resolution of some tens of nanometers. Also it allows to apply methods
of optical spectroscopy for local investigations of microbiological and
semiconductor objects, to modify surfaces at a super-dense information
recording and nanolithography, to influence selectively the elements of
biostructures.
Key words:
sensor, near-field optical microscope
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